Forming Holes in Silicon Substrates by using Ultrasonic Machining.
نویسندگان
چکیده
منابع مشابه
Rotary ultrasonic machining of silicon carbide: designed experiments
Silicon carbide (SiC) has found a variety of engineering applications due to its superior properties. However, it is still desirable to study cost-effective processes to machine silicon carbide. This paper presents the results of a designed experimental investigation into Rotary Ultrasonic Machining (RUM) of silicon carbide. A four-variable two-level full factorial design was employed to reveal...
متن کاملDrilling High Precision Holes in Ti6Al4V Using Rotary Ultrasonic Machining and Uncertainties Underlying Cutting Force, Tool Wear, and Production Inaccuracies
Ti6Al4V alloys are difficult-to-cut materials that have extensive applications in the automotive and aerospace industry. A great deal of effort has been made to develop and improve the machining operations of Ti6Al4V alloys. This paper presents an experimental study that systematically analyzes the effects of the machining conditions (ultrasonic power, feed rate, spindle speed, and tool diamete...
متن کاملAn investigation into the machining characteristics of titanium using ultrasonic machining
This paper presents a review on the problems encountered in machining titanium and application of USM in machining titanium and its alloys. Experiments have been conducted to assess the effect of three factors-tool material, grit size of the abrasive slurry and power rating of ultrasonic machine on machining characteristics of titanium (ASTM Grade I) using full factorial approach for design and...
متن کاملUltrasonic Vibration Assisted Electro-Discharge Machining
An ultrasonic vibration has been superposed on the normal electrode movement to increase the flushing effect during a micro electro-discharge machining (EDM) process. A systematic study on the effects of ultrasonic vibration on the EDM performance for fabricating microholes in Nitinol has been completed. The introduction of ultrasonic vibration to the microEDM process has more than 60 times inc...
متن کاملUltrasonic Machining at the Nanometer Scale
Experiments on Highly Oriented Pyrolytic Graphite (HOPG) demonstrate that ultrasonic-assisted actuation with the tip of an Atomic Force Microscope (AFM) cantilever can induce stacking modifications and folding of triangular-shaped HOPG surface flakes. We have generated permanent displacements of buried dislocations that require stacking changes of extended graphene layers by repeatedly scanning...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 1997
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.117.55